|

|
|
|
|
|
|

|
Á¦Ç°¿¡ ´ëÇÑ ±¸ÀÔ¹®ÀÇ
¶Ç´Â ÀÚ¼¼ÇÑ Á¤º¸¸¦
¿øÇϽô ºÐÀº Á¦Ç°¹®ÀǸ¦
Ŭ¸¯ÇÏ½Ã°í ³»¿ëÀ»
ÀÔ·ÂÇØ ÁÖ½Ã¸é ºü¸¥
½Ã°£ ³»¿¡ ´äº¯µå¸®µµ·Ï
ÇϰڽÀ´Ï´Ù.
|
|
|
|
|

|
|
Equipment
|
Automatic Dicing Saw
|
|
Maker
|
Disco
|
|
Model
|
DAD 560
|
|
Status
|
Excellent
|
|
Location
|
In Factory
|
|
Application
|
Dicing/Cutting/Slotting various wafers
|
|
|
|
|
| 
|
|
Á¦¸ñ ¾øÀ½
| ºÐ·ù |
Ç׸ñ |
»ç¾ç |
´ÜÀ§ |
| Workpiece size |
©ª152.4 |
(mm) |
| X-axis |
Useable stroke |
220 |
(mm) |
| Cut speed |
0.04~300.00 |
(mm/s) |
| Bearing type |
Air guide |
¡¡ |
| Y-axis |
Useable stroke |
160 |
(mm) |
| Indexing step range |
0.0001 to 160.0000 |
(mm) |
| Position accuracy (cumulative pitch) |
less than 0.002/160 |
(mm) |
| Position accuracy (single pitch) |
less than 0.001/5 |
(mm) |
| Bearing type |
Linear guide |
¡¡ |
| Z-axis |
Maximum cutting
stroke |
33 |
(mm) |
| Minimum step |
0.0005 |
(mm) |
| Repeating accuracy |
0.001/5 |
(mm) |
| Maximum blade size |
76.2 |
(mm) |
| ¥È-axis |
Rotation Range |
0 to 130 |
(deg) |
| Spindle |
Output |
1.5 |
(kW) |
| Maximum revolution |
30,000 |
(min-1[rpm]) |
| Applicable Tape Frame |
MAX 2-6-1 |
¡¡ |
| Utilities |
Power supply |
3Phase 200V |
¡¡ |
| 50-60Hz |
¡¡ |
| Power consumption |
| When processing |
0.59 |
(kW) |
| During warm-up |
0.51 |
(kW) |
| Maximum power |
3 |
(kVA) |
| Air pressure |
0.5~0.8[5.0~8.0] |
(MPa[kgf/cm2]) |
| Air flow rate |
250 |
(L/min(ANR)) |
| Water pressure |
0.2~0.4[2~4] |
(MPa[kgf/cm2]) |
| Water flow rate |
| Cutting water |
5.0 maximum |
(L/min) |
| Cooling water |
more than 2.5 |
(L/min) |
| Duct required suction |
2.5~5 |
(m3/min) |
| Machine size |
796W x 850D x 1,615H |
(mm) |
| ¡¡ |
(including monitor) |
31.3W x 33.5D x 63.6H |
(inch) |
| Machine weight |
570 |
(kg) |
|
|
|

|
|
|
|
  
|
|
|
|
|
|
|
|